DESMEAR MODULE OF A HORIZONTAL PROCESS LINE AND A METHOD FOR SEPARATION AND REMOVAL OF DESMEAR PARTICLES FROM SUCH A DESMEAR MODULE

A desmear module for a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated for a removal of precipitates comprising a desmear container connectable to a desmear unit, a pump and at least a first liquid connection element for conne...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: GRÜSSNER Stefan, SKUPIN Andreas
Format: Patent
Sprache:eng
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