SEMICONDUCTOR DEVICE INCLUDING AN OPTICAL MEASUREMENT PATTERN

A semiconductor device includes a substrate including at least two semiconductor chip regions and a scribe lane region disposed between the semiconductor chip regions. The semiconductor device additionally includes a first optical measurement pattern disposed on the substrate. The semiconductor devi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PARK YOUNG-SIK, Kim Yi-Gwon, Bae Yong-Kug, Yang Ga-Hyun, Choi Sung-Won, Ku Hee-Ho
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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