DEPOSITION OF ZINC OXYSULPHIDE BY CVD

A method of coating a substrate with zinc oxysulphate (ZnO(1-x)Sx, where 0≦x≦1) by atmospheric pressure chemical vapour deposition is disclosed. Various precursors offering sources of zinc, oxygen and sulphur are provided.

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Bibliographische Detailangaben
Hauptverfasser:	PALMER LIAM SONIE, NICHOL GARY ROBERT, COLLEY ANNA LOUISE, HARRIS PETER MICHAEL, STRICKLER DAVID ALAN
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	A method of coating a substrate with zinc oxysulphate (ZnO(1-x)Sx, where 0≦x≦1) by atmospheric pressure chemical vapour deposition is disclosed. Various precursors offering sources of zinc, oxygen and sulphur are provided.