COMPOSITE SUBSTRATE AND THICKNESS-TENDENCY ESTIMATING METHOD FOR PIEZOELECTRIC SUBSTRATE

A composite substrate according to the present invention includes a support substrate having a diameter of 2 inches or more, and a piezoelectric substrate having a thickness of 20 μm or less and bonded to the support substrate to transmit light. The piezoelectric substrate has a thickness distributi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KOIZUMI Ayato, NAGAE Tomoki
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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