SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE PROCESSING APPARATUS

A substrate processing apparatus includes plural heating modules each including a table on which a substrate is placed to be heated, the substrate having plural heated zones. The table has plural heaters each assigned to heat respective ones of the heated zones. Heat generation of the heaters is con...

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Bibliographische Detailangaben

Hauptverfasser:	TAKESHITA Kazuhiro, UMEKI Kazuto, SEKIMOTO Eiichi, SHIGETOMI Kenichi, YOSHIHARA Kousuke, SAIKUSA Takeshi, FUKUDOME Takayuki, ENOKIDA Suguru
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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