INTEGRATED FORCE SENSING ELEMENT

An integrated force sensing element includes a piezoelectric sensor formed in an integrated circuit (IC) chip and a strain gauge at least partially overlying the piezoelectric sensor, where the piezoelectric sensor is able to flex. A human-machine interface using the integrated force sensing element...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Shih Wei-Yan, Lee Seung Bae, Summerfelt Scott Robert, Sculley Terry Lee, Lohia Alok, Kummerl Steve, Toth Mark Stephen
Format: Patent
Sprache:eng
Schlagworte:
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