A RIBON BEAM ION SOURCE OF ARBITRARY LENGTH

The invention is a unique and substantive improvement in ion source assemblies which is able to produce a ribbon-shaped ion beam having an arbitrarily chosen breadth dimension which is at least ten times greater [and often more than thirty times greater] than its thickness dimension, the breadth and...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: White Nicholas R
Format: Patent
Sprache:eng
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