MULTISTAGE SENSING DEVICE

A multistage sensing device includes a substrate, a deformable unit, and a sensor unit. The deformable unit has a first body disposed on the substrate, and a second body disposed on the first body and opposite to the substrate. The sensor unit includes a first sensor element and a second sensor elem...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FANG Wei-Leun, LAI Wei-Cheng
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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