THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE

A three-dimensional semiconductor memory device includes a stack on a substrate including electrodes vertically stacked on a substrate, lower insulating patterns disposed between the stack and the substrate, the lower insulating patterns being adjacent to both sidewalls of the stack and being spaced...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Park Youngwoo, Kang Shinhwan, Lee Heonkyu, Lee Changhyun
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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