ELECTROMAGNETIC WAVE TREATMENT OF A SUBSTRATE AT MICROWAVE FREQUENCIES USING A WAVE RESONATOR

A processing system is disclosed, having a process chamber that houses a substrate for exposure of a surface of the substrate to a travelling electromagnetic (EM) wave. The processing system also includes an EM wave transmission antenna configured to launch the travelling EM wave into the process ch...

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Bibliographische Detailangaben
1. Verfasser: Vukovic Mirko
Format: Patent
Sprache:eng
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