Arc Lamp and Substrate Heating Apparatus Having the Arc Lamp
An arc lamp includes an arc tube configured to receive a reaction gas therein, and an anode and a cathode disposed opposite one another within the arc tube and configured to generate an electrical arc. The anode includes an anode head portion extending inwardly from an end portion of the arc tube, a...
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| creator | KANG Sung-Ho LEE Yong-Hun KIM Min-Chul CHOI Sun-Hong LEE Ju-Hong Kang Gon-Su LEE Kwang-jun RYU Sun-Ho HA Sang-Cheol |
| description | An arc lamp includes an arc tube configured to receive a reaction gas therein, and an anode and a cathode disposed opposite one another within the arc tube and configured to generate an electrical arc. The anode includes an anode head portion extending inwardly from an end portion of the arc tube, and an anode tip portion bonded to the anode head portion and comprising a trench extending in a top surface along a peripheral region of the anode tip portion. |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | Arc Lamp and Substrate Heating Apparatus Having the Arc Lamp |
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