PIEZOELECTRIC THIN FILM RESONATOR, FILTER, AND DUPLEXER

A piezoelectric thin film resonator includes: a substrate; a piezoelectric film located on the substrate and having a Poisson's ratio of 0.33 or less; a lower electrode and an upper electrode facing each other across the piezoelectric film; and an insertion film that is located in the piezoelec...

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Bibliographische Detailangaben
1. Verfasser: YOKOYAMA Tsuyoshi
Format: Patent
Sprache:eng
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