Negative Ribbon Ion Beams from Pulsed Plasmas

An apparatus and method for the creation of negative ion beams is disclosed. The apparatus includes an RF ion source, having an extraction aperture. An antenna disposed proximate a dielectric window is energized by a pulsed RF power supply. While the RF power supply is actuated, a plasma containing...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Dzengeleski Joseph P, Radovanov Svetlana B, Distaso Daniel
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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