TESTING ASSEMBLY INCLUDING A MULTIPLE DEGREE OF FREEDOM STAGE

A multiple degree of freedom sample stage or testing assembly including a multiple degree of freedom sample stage. The multiple degree of freedom sample stage includes a plurality of stages including linear, and one or more of rotation or tilt stages configured to position a sample in a plurality of...

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Bibliographische Detailangaben
Hauptverfasser: Asif Syed Amanulla Syed, Rasugu Derek, Feng Yuxin, Cyrankowski Edward, Major Ryan
Format: Patent
Sprache:eng
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