METHOD FOR INSPECTING AN OBJECT WITH AN ARRAY OF BEAMS

According to an embodiment of the invention there may be provided a system for inspecting an object, the system may include a traveling lens acousto-optic device that is configured to generate a sequence of traveling lenses that propagate through an active region of the traveling lens acousto-optic...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Almog Ido, Naftali Ron
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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