ANCHORING CONDUCTIVE MATERIAL IN SEMICONDUCTOR DEVICES

ANCHORING CONDUCTIVE MATERIAL IN SEMICONDUCTOR DEVICES

Copper (Cu) grain boundaries can move during a thermal cycle resulting in the Cu grain position being offset. Such Cu pumping can disturb the surface of a bottom metal, and can physically break a dielectric of a metal-insulator-metal (MIM) capacitor. By capping the bottom metal with an anchoring cap...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LI Yue, RADOJCIC Ratibor, GU Shiqun
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:Copper (Cu) grain boundaries can move during a thermal cycle resulting in the Cu grain position being offset. Such Cu pumping can disturb the surface of a bottom metal, and can physically break a dielectric of a metal-insulator-metal (MIM) capacitor. By capping the bottom metal with an anchoring cap, Cu pumping is reduced or eliminated.