CONTROLLING ION ENERGY WITHIN A PLASMA CHAMBER

Systems and methods controlling ion energy within a plasma chamber are described. One of the systems includes an upper electrode coupled to a sinusoidal RF generator for receiving a sinusoidal signal and a nonsinusoidal RF generator for generating a nonsinusoidal signal. The system further includes...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Paterson Alex, Kamarthy Gowri, Lill Thorsten, Singh Harmeet
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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