System and Method for Providing a Clean Environment in an Electron-Optical System

An electron extractor of an electron source capable of absorbing contaminant materials from a cavity proximate to the extractor is disclosed. The electron extractor includes a body. The body of the electron extractor is formed from one or more non-evaporable getter materials. The one or more non-eva...

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Bibliographische Detailangaben
Hauptverfasser: Delgado Gildardo, Rose Garry A, Schultz William G
Format: Patent
Sprache:eng
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