VIA LEAKAGE AND BREAKDOWN TESTING

Various particular embodiments include a via testing structure, including: a first terminal coupled to a first set of sensing lines in a top level of the structure; a second terminal coupled to a second set of sensing lines in the top level of the structure, wherein first set of sensing lines and th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Dufresne Roger A, Kolvenbach Kevin W, Chen Fen, Griffin Charles W
Format: Patent
Sprache:eng
Schlagworte:
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