TREATMENT SOLUTION SUPPLY METHOD, NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM, AND TREATMENT SOLUTION SUPPLY APPARATUS

TREATMENT SOLUTION SUPPLY METHOD, NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM, AND TREATMENT SOLUTION SUPPLY APPARATUS

A treatment solution supply method includes: a degassed treatment solution generating step of degassing a treatment solution by a degassing mechanism to generate a degassed treatment solution; a treatment solution storing step of storing the degassed treatment solution in a container; a filter solut...

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Hauptverfasser: KIMURA Kazuhiko, YUMOTO Tomoyuki, SHITE Hideo
Format: Patent
Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEMICONDUCTOR DEVICES
SEPARATION
TRANSPORTING
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creator KIMURA Kazuhiko
YUMOTO Tomoyuki
SHITE Hideo
description A treatment solution supply method includes: a degassed treatment solution generating step of degassing a treatment solution by a degassing mechanism to generate a degassed treatment solution; a treatment solution storing step of storing the degassed treatment solution in a container; a filter solution-passing step of bringing a downstream side from a filter connected to a downstream side from the container via a treatment solution supply pipe to a negative pressure with respect to a pressure in the container to pass the treatment solution in the container through the filter; and a negative pressure maintaining step of maintaining a state in which the downstream side from the filter is brought to the negative pressure, for a predetermined period, after stopping supply of the treatment solution from the container to the filter.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEMICONDUCTOR DEVICES
SEPARATION
TRANSPORTING
title TREATMENT SOLUTION SUPPLY METHOD, NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM, AND TREATMENT SOLUTION SUPPLY APPARATUS
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