Cryopump Arrangement For Improved Pump Speed

An apparatus including a movable cryopump that may be disposed in a first operational position and a second regeneration position is disclosed. In the first operational position, the front surface of the cryopump may be disposed in the same plane as the wall of the processing chamber, effectively se...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Hermanson Eric D, Borichevsky Steven C
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS SEPARATION TRANSPORTING WEAPONS
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