ACTUATOR AND VARIABLE SHAPE MIRROR USING ACTUATOR
Provided is an actuator having a structure with which stress concentration on an elastic member of the actuator can be reduced in a manufacturing process thereof and breakage of the elastic member can be inhibited. The actuator includes a movable member, an elastic member configured to connect the m...
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| creator | Tamamori Kenji |
| description | Provided is an actuator having a structure with which stress concentration on an elastic member of the actuator can be reduced in a manufacturing process thereof and breakage of the elastic member can be inhibited. The actuator includes a movable member, an elastic member configured to connect the movable member and a supporting member to each other, and an electrode pair having a comb electrode structure for displacing the movable member in a direction perpendicular to a reflective surface in which all movable comb electrodes extending from the movable member are substantially in parallel with one another, and a portion of the elastic member, which is located at a beginning of extension from the movable member, is substantially in parallel with the movable comb electrodes. |
| format | Patent |
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The actuator includes a movable member, an elastic member configured to connect the movable member and a supporting member to each other, and an electrode pair having a comb electrode structure for displacing the movable member in a direction perpendicular to a reflective surface in which all movable comb electrodes extending from the movable member are substantially in parallel with one another, and a portion of the elastic member, which is located at a beginning of extension from the movable member, is substantially in parallel with the movable comb electrodes.</description><language>eng</language><subject>CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ; DIAGNOSIS ; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; GENERATION ; HUMAN NECESSITIES ; HYGIENE ; IDENTIFICATION ; MEDICAL OR VETERINARY SCIENCE ; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES ; MICROSTRUCTURAL TECHNOLOGY ; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS ; OPTICS ; PERFORMING OPERATIONS ; PHYSICS ; SURGERY ; TRANSPORTING</subject><creationdate>2016</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20160728&DB=EPODOC&CC=US&NR=2016216508A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76516</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20160728&DB=EPODOC&CC=US&NR=2016216508A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Tamamori Kenji</creatorcontrib><title>ACTUATOR AND VARIABLE SHAPE MIRROR USING ACTUATOR</title><description>Provided is an actuator having a structure with which stress concentration on an elastic member of the actuator can be reduced in a manufacturing process thereof and breakage of the elastic member can be inhibited. 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| language | eng |
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| subjects | CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DIAGNOSIS ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION HUMAN NECESSITIES HYGIENE IDENTIFICATION MEDICAL OR VETERINARY SCIENCE MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS SURGERY TRANSPORTING |
| title | ACTUATOR AND VARIABLE SHAPE MIRROR USING ACTUATOR |
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