CHARGED PARTICLE BEAM DRAWING APPARATUS

CHARGED PARTICLE BEAM DRAWING APPARATUS

A charged particle beam drawing apparatus has a vacuum container including a bottom plate, the bottom plate including a curved portion curved externally and a plurality of supporting portions disposed on an outer periphery of the curved portion, a stage provided in the vacuum container and having a...

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Hauptverfasser: SAITO HIROYASU, IDENO KEITA
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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creator SAITO HIROYASU
IDENO KEITA
description A charged particle beam drawing apparatus has a vacuum container including a bottom plate, the bottom plate including a curved portion curved externally and a plurality of supporting portions disposed on an outer periphery of the curved portion, a stage provided in the vacuum container and having a target object mounted on the stage, a stage actuator supported by the supporting portions in the vacuum container and to move the stage, a two dimensional scale provided on a lower surface of the stage, a detector disposed under the two dimensional scale and detecting a position of the stage by the two dimensional scale, and a support body including a plurality of end portions individually attached to the supporting portions, and to support the detector across the curved portion.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title CHARGED PARTICLE BEAM DRAWING APPARATUS
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