FIN-FET DEVICE AND MANUFACTURING METHOD THEREOF

A fin-like field-effect transistor (Fin-FET) device includes a substrate, a fin structure disposed on the substrate, and an isolation structure disposed adjacent to the fin structure. The fin structure includes a recessed structure, which a bottom of the recessed structure is below a top surface of...

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Bibliographische Detailangaben
Hauptverfasser: LIN CHIH-HAN, CHANG MINGING, LIN JR-JUNG
Format: Patent
Sprache:eng
Schlagworte:
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