MULTICHANNEL RELAY ASSEMBLY WITH IN LINE MEMS SWITCHES

An ohmic RF MEMS relay includes a substrate with a capacitive coupling, Csub; two actuating elements electrically coupled in series, so as to define a channel, wherein the actuating elements are configured to be independently actuated or simultaneously operated. The actuating elements have their own...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	AIMI MARCO FRANCESCO, LEE YONGJAE, KEIMEL CHRISTOPHER FRED, CLAYDON GLENN SCOTT
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRICITY RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE WAVEGUIDES
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