CASE ISOLATED OIL FILLED MEMS PRESSURE SENSOR

CASE ISOLATED OIL FILLED MEMS PRESSURE SENSOR

An oil filled pressure sensor is provided. The sensor includes a drift-stabilized pressure sensing element mounted to and electrically isolated from a header body, the pressure sensing element immersed in an oil filled cavity and temperature stabilized for sensing pressure in the cavity without subs...

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Hauptverfasser: BRODEUR RUSSELL P, WASHBURN KEITH R, STROTT DOUGLAS B
Format: Patent
Sprache:eng
Schlagworte:
ELECTRICITY
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
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creator BRODEUR RUSSELL P
WASHBURN KEITH R
STROTT DOUGLAS B
description An oil filled pressure sensor is provided. The sensor includes a drift-stabilized pressure sensing element mounted to and electrically isolated from a header body, the pressure sensing element immersed in an oil filled cavity and temperature stabilized for sensing pressure in the cavity without substantial signal drift. A method of fabrication is provided.
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subjects ELECTRICITY
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
title CASE ISOLATED OIL FILLED MEMS PRESSURE SENSOR
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