INTEGRATED THINFILM RESISTOR AND MIM CAPACITOR WITH A LOW SERIAL RESISTANCE
An electronic device comprising a semiconductor structure having a back end capacitor and a back end thin film resistor and a method of manufacturing the same. The semiconductor structure includes a first dielectric layer, a bottom plate of the capacitor and a thin film resistor body. The bottom pla...
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Format: | Patent |
Sprache: | eng |
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