CHARGED PARTICLE MICROSCOPE WITH BAROMETRIC PRESSURE CORRECTION

CHARGED PARTICLE MICROSCOPE WITH BAROMETRIC PRESSURE CORRECTION

A method of mitigating the effects of environmental pressure variation while using a charged particle microscope is described. The charged particle microscope equipped with a barometric pressure sensor and an automatic controller configured to use the signal from the barometric sensor as an input to...

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Hauptverfasser: VISSCHER ALBERT, MOERS MARCO HUGO PETRUS
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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creator VISSCHER ALBERT
MOERS MARCO HUGO PETRUS
description A method of mitigating the effects of environmental pressure variation while using a charged particle microscope is described. The charged particle microscope equipped with a barometric pressure sensor and an automatic controller configured to use the signal from the barometric sensor as an input to a control procedure to compensate for a relative positional error between the charged particle beam and the specimen holder.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title CHARGED PARTICLE MICROSCOPE WITH BAROMETRIC PRESSURE CORRECTION
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