MEMS DEVICE WITH DIFFERENTIAL VERTICAL SENSE ELECTRODES

A MEMS device includes a first sense electrode and a first portion of a sense mass formed in a first structural layer, where the first sense electrode is fixedly coupled with the substrate and the first portion of the sense mass is suspended over the substrate. The MEMS device further includes a sec...

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Bibliographische Detailangaben
Hauptverfasser: GEISBERGER AARON A, KNIFFIN MARGARET L
Format: Patent
Sprache:eng
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