EMBEDDED TUNGSTEN RESISTOR

A high TCR tungsten resistor on a reverse biased Schottky diode. A high TCR tungsten resistor on an unsilicided polysilicon platform geometry. A high TCR tungsten resistor between two parallel polysilicon leads on remaining contact etch stop dielectric. A high TCR tungsten resistor embedded in a int...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KUNZ KEITH EDMUND, MCMULLAN RUSSELL CARLTON, NARAYAN SUBRAMANIAN J, SANKARAN SWAMINATHAN, PUSHKARAKSHAN BINU KAMBLATH
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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