WIRING STRUCTURES

Wiring structures with dummy metal features and methods of manufacture are disclosed. A structure includes a metal wiring structure, and dummy metal features in electrical and direct physical contact with the metal wiring structure in a same plane as the metal wiring structure. The dummy metal featu...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHRISTIANSEN CATHRYN J, DUFRESNE ROGER A, CHEN FEN, GRIFFIN CHARLES W
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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