MINIMIZING GRAZING INCIDENCE REFLECTIONS FOR RELIABLE EUV POWER MEASUREMENTS

A light source includes a light generating chamber and a collector disposed in the light generating chamber. A target material generator configured to propel a quantity of target material toward an irradiation region is disposed in front of a reflective surface of the collector. A plurality of photo...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PURVIS MICHAEL A, DING JIE L, SENEKERIMYAN VAHAN A
Format:	Patent
Sprache:	eng
Schlagworte:	COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASUREMENT OF NUCLEAR OR X-RADIATION MEASURING PHYSICS RADIATION PYROMETRY TESTING
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