SELF-ALIGNED BIPOLAR JUNCTION TRANSISTOR HAVING SELF-PLANARIZING ISOLATION RAISED BASE STRUCTURES

A collector region is formed between insulating shallow trench isolation regions within a substrate. A base material is epitaxially grown on the collector region and the shallow trench isolation regions. The base material forms a base region on the collector region and extrinsic base regions on the...

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Bibliographische Detailangaben
Hauptverfasser: FEILCHENFELD NATALIE B, LIU QIZHI
Format: Patent
Sprache:eng
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