Method of fault detection and classification (FDC) for improved tool control capabilities

A method of a fault detection and classification (FDC) may be used to determine outlier tools from a plurality of tools. The method includes generating a plurality of parameter charts, generating a plurality of group charts according to the plurality of parameter charts, generating a score table acc...

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Bibliographische Detailangaben
Hauptverfasser: HSIEH CHING-HSING, CHU HSIN-KUN, CHUNG FENGI, HUANG CHEN-HUI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method of a fault detection and classification (FDC) may be used to determine outlier tools from a plurality of tools. The method includes generating a plurality of parameter charts, generating a plurality of group charts according to the plurality of parameter charts, generating a score table according to the plurality of group charts, determining outlier tools according to the score table, and performing tool correction on the outlier tools.