Radiation Collector, Radiation Source and Lithographic Apparatus

A radiation collector comprising a first collector segment comprising a plurality of grazing incidence reflector shells configured to direct radiation to converge in a first location at a distance from the radiation collector, a second collector segment comprising a plurality of grazing incidence re...

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Hauptverfasser:	LOOPSTRA ERIK ROELOF, VANDERHALLEN IVO, KEMPEN ANTONIUS THEODORUS WILHELMUS, SCHEEPERS MARCUS PETRUS, BEERENS RUUD ANTONIUS CATHARINA MARIA, VAN LIESHOUT RICHARD HENRICUS ADRIANUS, BIELING STIG, DONDERS SJOERD NICOLAAS LAMBERTUS, CADEE THEODORUS PETRUS MARIA, STRUYCKEN ALEXANDER MATTHIJS, FRIJNS OLAV WALDEMAR VLADIMIR, TEN KATE NICOLAAS
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY GAMMA RAY OR X-RAY MICROSCOPES HOLOGRAPHY IRRADIATION DEVICES MATERIALS THEREFOR NUCLEAR ENGINEERING NUCLEAR PHYSICS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR X-RAY TECHNIQUE
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