CLEANING OF CHAMBER COMPONENTS WITH SOLID CARBON DIOXIDE PARTICLES

Disclosed herein are systems and methods for cleaning a ceramic article using a stream of solid carbon dioxide (CO2) particles. A method includes flowing liquid CO2 into a spray nozzle, and directing a first stream of solid CO2 particles from the spray nozzle toward a ceramic article for a first tim...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GUO YUANHONG, SUH SONG-MOON, XUAN GUANGCHI, AGARWAL PULKIT
Format:	Patent
Sprache:	eng
Schlagworte:	ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL CLEANING CLEANING IN GENERAL GRINDING PERFORMING OPERATIONS POLISHING PREVENTION OF FOULING IN GENERAL TRANSPORTING
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