METHOD FOR FABRICATING A FLEXIBLE ELECTRONIC STRUCTURE AND A FLEXIBLE ELECTRONIC STRUCTURE

Flexible electronic structure and methods for fabricating flexible electronic structures are provided. An example method includes applying a first layer to a substrate, creating a plurality of vias through the first layer to the substrate, and applying a second polymer layer to the first layer such...

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Bibliographische Detailangaben
Hauptverfasser: GHAFFARI ROOZBEH, HU XIAOLONG, DE GRAFF BASSEL, AURORA WILLIAM J, ELOLAMPI BRIAN DAVID
Format: Patent
Sprache:eng
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Zusammenfassung:Flexible electronic structure and methods for fabricating flexible electronic structures are provided. An example method includes applying a first layer to a substrate, creating a plurality of vias through the first layer to the substrate, and applying a second polymer layer to the first layer such that the second polymer forms anchors contacting at least a portion of the substrate. At least one electronic device layer is disposed on a portion of the second polymer layer. At least one trench is formed through the second polymer layer to expose at least a portion of the first layer. At least a portion of the first layer is removed by exposing the structure to a selective etchant to providing a flexible electronic structure that is in contact with the substrate. The electronic structure can be released from the substrate.