Transmission Line RF Applicator for Plasma Chamber

A transmission line RF applicator apparatus and method for coupling RF power to a plasma in a plasma chamber. The apparatus comprises two conductors, one of which has a plurality of apertures. In one aspect, apertures in different portions of the conductor have different sizes, spacing or orientatio...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ANWAR SUHAIL, TRUONG DOUGLAS D, CHO SEON-MEE, SHINDE RANJIT INDRAJIT, SORENSEN CARL A, TANAKA TSUTOMU, KUDELA JOZEF, WHITE JOHN M
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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