POWER DEVICE AND METHOD FOR FABRICATING THE SAME

A power device having fast switching characteristic, while keeping EMI noise to a minimum and a method of fabricating the same are provided. The power device includes a first field stop layer having a first conductivity type, a first drift region formed on the first field stop layer and having a fir...

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Bibliographische Detailangaben
Hauptverfasser: CHOI YOUNGUL, JEON JAE-DUCK, KIM YOUNGUL, KIM JIN-MYUNG, PARK KYEONG-SEOK
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A power device having fast switching characteristic, while keeping EMI noise to a minimum and a method of fabricating the same are provided. The power device includes a first field stop layer having a first conductivity type, a first drift region formed on the first field stop layer and having a first conductivity type in an impurity concentration that is lower than the first field stop layer, a buried region formed on the first drift region and having the first conductivity type in an impurity concentration that is higher than the first drift region, a second drift region formed on the buried region, a power device cell formed at an upper portion of the second drift region, and a collector region formed below the first field stop layer.