MICRO-ELECTRO-MECHANICAL SYSTEM MIRROR AND MICRO-ELECTRO-MECHANICAL SYSTEM REFLECTIVE DEVICE

A micro-electro-mechanical system mirror comprises a reflective mirror and a number of MEMS driving modules. A number of driving shafts extend from a side surface of the mirror body, each driving shaft being connected to a driving module. Each driving module comprises a container of liquid, an optic...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	SHEU YI-ZHONG
Format:	Patent
Sprache:	eng
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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