IMAGE PROCESSOR, METHOD FOR GENERATING PATTERN USING SELF- ORGANIZING LITHOGRAPHIC TECHNIQUES AND COMPUTER PROGRAM

IMAGE PROCESSOR, METHOD FOR GENERATING PATTERN USING SELF- ORGANIZING LITHOGRAPHIC TECHNIQUES AND COMPUTER PROGRAM

An image processor, a method for generating a pattern using self-organizing lithographic techniques, and a computer program are provided to achieve image processing suitable for addressing a sample generated by patterning using Directed Self-Assembly (DSA), and the processor, method, and computer pr...

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Hauptverfasser: KOSHIHARA SHUNSUKE, ISAWA MIKI, SUTANI TAKUMICHI, SUGIYAMA AKIYUKI
Format: Patent
Sprache:eng
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APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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creator KOSHIHARA SHUNSUKE
ISAWA MIKI
SUTANI TAKUMICHI
SUGIYAMA AKIYUKI
description An image processor, a method for generating a pattern using self-organizing lithographic techniques, and a computer program are provided to achieve image processing suitable for addressing a sample generated by patterning using Directed Self-Assembly (DSA), and the processor, method, and computer program are characterized in that a template for addressing is prepared on the basis of guide pattern data used for patterning by DSA. The above configuration makes it possible to provide an addressing pattern suitable for visual field positioning in measuring or inspecting a pattern formed through the patterning process using DSA.
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subjects APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
title IMAGE PROCESSOR, METHOD FOR GENERATING PATTERN USING SELF- ORGANIZING LITHOGRAPHIC TECHNIQUES AND COMPUTER PROGRAM
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