OSCILLATING VOLTAGE OF SENSE ELECTRODES IN A MEMS TUNING FORK GYROSCOPE
Embodiments of the subject application provide a method for operating a micro-electro-mechanical system (MEMS) tuning fork gyroscope. The method includes oscillating a voltage on a first sense electrode out-of-plane from and proximate a first side of a first proof mass between a first voltage and a...
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | SUTTON MICHAEL S WEBER MARK W |
| description | Embodiments of the subject application provide a method for operating a micro-electro-mechanical system (MEMS) tuning fork gyroscope. The method includes oscillating a voltage on a first sense electrode out-of-plane from and proximate a first side of a first proof mass between a first voltage and a second voltage at a first frequency. The method also includes oscillating a voltage on a second sense electrode out-of-plane from and proximate a second side of the first proof mass between the first voltage and the second voltage at the first frequency and 180 degrees out-of-phase with the voltage on the first sense electrode. The method also includes generating a rate signal corresponding to a rotation rate of the first proof mass by first demodulating an out-of-plane signal from the first proof mass at the first frequency and second demodulating the out-of-plane signal in phase with in-plane motion of the first proof mass. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2015253138A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2015253138A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2015253138A13</originalsourceid><addsrcrecordid>eNrjZHD3D3b29PFxDPH0c1cI8_cJcXR3VfB3Uwh29Qt2VXD1cXUOCfJ3cQ1W8PRTcFTwdfUNVggJ9QMpdvMP8lZwjwwCGuAf4MrDwJqWmFOcyguluRmU3VxDnD10Uwvy41OLCxKTU_NSS-JDg40MDE2NTI0NjS0cDY2JUwUAhfktcg</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>OSCILLATING VOLTAGE OF SENSE ELECTRODES IN A MEMS TUNING FORK GYROSCOPE</title><source>esp@cenet</source><creator>SUTTON MICHAEL S ; WEBER MARK W</creator><creatorcontrib>SUTTON MICHAEL S ; WEBER MARK W</creatorcontrib><description>Embodiments of the subject application provide a method for operating a micro-electro-mechanical system (MEMS) tuning fork gyroscope. The method includes oscillating a voltage on a first sense electrode out-of-plane from and proximate a first side of a first proof mass between a first voltage and a second voltage at a first frequency. The method also includes oscillating a voltage on a second sense electrode out-of-plane from and proximate a second side of the first proof mass between the first voltage and the second voltage at the first frequency and 180 degrees out-of-phase with the voltage on the first sense electrode. The method also includes generating a rate signal corresponding to a rotation rate of the first proof mass by first demodulating an out-of-plane signal from the first proof mass at the first frequency and second demodulating the out-of-plane signal in phase with in-plane motion of the first proof mass.</description><language>eng</language><subject>GYROSCOPIC INSTRUMENTS ; MEASURING ; MEASURING DISTANCES, LEVELS OR BEARINGS ; NAVIGATION ; PHOTOGRAMMETRY OR VIDEOGRAMMETRY ; PHYSICS ; SURVEYING ; TESTING</subject><creationdate>2015</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20150910&DB=EPODOC&CC=US&NR=2015253138A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20150910&DB=EPODOC&CC=US&NR=2015253138A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SUTTON MICHAEL S</creatorcontrib><creatorcontrib>WEBER MARK W</creatorcontrib><title>OSCILLATING VOLTAGE OF SENSE ELECTRODES IN A MEMS TUNING FORK GYROSCOPE</title><description>Embodiments of the subject application provide a method for operating a micro-electro-mechanical system (MEMS) tuning fork gyroscope. The method includes oscillating a voltage on a first sense electrode out-of-plane from and proximate a first side of a first proof mass between a first voltage and a second voltage at a first frequency. The method also includes oscillating a voltage on a second sense electrode out-of-plane from and proximate a second side of the first proof mass between the first voltage and the second voltage at the first frequency and 180 degrees out-of-phase with the voltage on the first sense electrode. The method also includes generating a rate signal corresponding to a rotation rate of the first proof mass by first demodulating an out-of-plane signal from the first proof mass at the first frequency and second demodulating the out-of-plane signal in phase with in-plane motion of the first proof mass.</description><subject>GYROSCOPIC INSTRUMENTS</subject><subject>MEASURING</subject><subject>MEASURING DISTANCES, LEVELS OR BEARINGS</subject><subject>NAVIGATION</subject><subject>PHOTOGRAMMETRY OR VIDEOGRAMMETRY</subject><subject>PHYSICS</subject><subject>SURVEYING</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2015</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZHD3D3b29PFxDPH0c1cI8_cJcXR3VfB3Uwh29Qt2VXD1cXUOCfJ3cQ1W8PRTcFTwdfUNVggJ9QMpdvMP8lZwjwwCGuAf4MrDwJqWmFOcyguluRmU3VxDnD10Uwvy41OLCxKTU_NSS-JDg40MDE2NTI0NjS0cDY2JUwUAhfktcg</recordid><startdate>20150910</startdate><enddate>20150910</enddate><creator>SUTTON MICHAEL S</creator><creator>WEBER MARK W</creator><scope>EVB</scope></search><sort><creationdate>20150910</creationdate><title>OSCILLATING VOLTAGE OF SENSE ELECTRODES IN A MEMS TUNING FORK GYROSCOPE</title><author>SUTTON MICHAEL S ; WEBER MARK W</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2015253138A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2015</creationdate><topic>GYROSCOPIC INSTRUMENTS</topic><topic>MEASURING</topic><topic>MEASURING DISTANCES, LEVELS OR BEARINGS</topic><topic>NAVIGATION</topic><topic>PHOTOGRAMMETRY OR VIDEOGRAMMETRY</topic><topic>PHYSICS</topic><topic>SURVEYING</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>SUTTON MICHAEL S</creatorcontrib><creatorcontrib>WEBER MARK W</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SUTTON MICHAEL S</au><au>WEBER MARK W</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>OSCILLATING VOLTAGE OF SENSE ELECTRODES IN A MEMS TUNING FORK GYROSCOPE</title><date>2015-09-10</date><risdate>2015</risdate><abstract>Embodiments of the subject application provide a method for operating a micro-electro-mechanical system (MEMS) tuning fork gyroscope. The method includes oscillating a voltage on a first sense electrode out-of-plane from and proximate a first side of a first proof mass between a first voltage and a second voltage at a first frequency. The method also includes oscillating a voltage on a second sense electrode out-of-plane from and proximate a second side of the first proof mass between the first voltage and the second voltage at the first frequency and 180 degrees out-of-phase with the voltage on the first sense electrode. The method also includes generating a rate signal corresponding to a rotation rate of the first proof mass by first demodulating an out-of-plane signal from the first proof mass at the first frequency and second demodulating the out-of-plane signal in phase with in-plane motion of the first proof mass.</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | eng |
| recordid | cdi_epo_espacenet_US2015253138A1 |
| source | esp@cenet |
| subjects | GYROSCOPIC INSTRUMENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING |
| title | OSCILLATING VOLTAGE OF SENSE ELECTRODES IN A MEMS TUNING FORK GYROSCOPE |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-27T03%3A36%3A20IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=SUTTON%20MICHAEL%20S&rft.date=2015-09-10&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS2015253138A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |