SEMICONDUCTOR DEVICE AND PRODUCTION DEVICE THEREFOR

SEMICONDUCTOR DEVICE AND PRODUCTION DEVICE THEREFOR

A semiconductor device includes a plurality of trench gates extending in a first direction and arranged with a space between one another in a second direction which is orthogonal to the first direction. Each of the plurality of trench gates includes: a first portion opened on a front surface of the...

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1. Verfasser: KUROKAWA YUTO
Format: Patent
Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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description A semiconductor device includes a plurality of trench gates extending in a first direction and arranged with a space between one another in a second direction which is orthogonal to the first direction. Each of the plurality of trench gates includes: a first portion opened on a front surface of the semiconductor substrate; a second portion extending from the first portion in a direction inclined relative to a depth direction of the semiconductor substrate toward a positive direction of the second direction; and a third portion extending from the first portion in a direction inclined relative to the depth direction of the semiconductor substrate toward a negative direction of the second direction.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title SEMICONDUCTOR DEVICE AND PRODUCTION DEVICE THEREFOR
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