METHOD OF CHARGING A TEST CARRIER AND A TEST CARRIER

A method of charging a substrate with a plurality of through-going bores and a charged substrate, where the substrate is charged with a liquid comprising particles in a concentration resulting in a high percentage of bores charged with liquid with only a single particle therein.

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Bibliographische Detailangaben
Hauptverfasser: CHRISTENSEN SUNE FANG, KUNDING ANDREAS HJARNE
Format: Patent
Sprache:eng
Schlagworte:
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