SUPERJUNCTION STRUCTURES FOR POWER DEVICES AND METHODS OF MANUFACTURE

A power device includes an active region and a termination region surrounding the active region. A plurality of pillars of first and second conductivity type are alternately arranged in each of the active and termination regions. The pillars of first conductivity type in the active and termination r...

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Bibliographische Detailangaben

Hauptverfasser:	KIM YONGSUB, SHENOY PRAVEEN MURALEEDHARAN, REXER CHRISTOPHER L, WANG QI, RINEHIMER MARK L, LEE JONGHUN, LEE JUNGKIL, KIM CHANGWOOK, YUN CHONGMAN, YEDINAK JOSEPH A, JUNG JINYOUNG, LEE JAEGIL, SHARP JOELLE, HIGGS JASONG M, JANG HOCHEOL, REICHL DWAYNE S
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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