POLISHING APPARATUS

A polishing apparatus which can perform power supply, signal transmission, and communication in a non-contact type to respective equipments in a polishing head and/or a polishing table by providing a non-contact type transmission connecter having no physical contact point on at least one of the poli...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	SAKATA KEISUKE
Format:	Patent
Sprache:	eng
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!