SYSTEM AND METHOD FOR USING A RATE OF DECAY MEASUREMENT FOR REAL TIME MEASUREMENT AND CORRECTION OF ZERO OFFSET AND ZERO DRIFT OF A MASS FLOW CONTROLLER OR MASS FLOW METER

The disclosed embodiments include a method, apparatus, and computer program product for providing a self-validating mass flow controller or mass flow meter. For example, in one embodiment, a self-validating mass flow controller is disclosed that does not require any software modification to a tool/t...

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Hauptverfasser: ELLEC CHRIS, VALENTINE BILL, LULL JOHN, KEHOE ANTHONY, BANARES BERWIN
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creator ELLEC CHRIS
VALENTINE BILL
LULL JOHN
KEHOE ANTHONY
BANARES BERWIN
description The disclosed embodiments include a method, apparatus, and computer program product for providing a self-validating mass flow controller or mass flow meter. For example, in one embodiment, a self-validating mass flow controller is disclosed that does not require any software modification to a tool/tool controller in which the mass flow controller is being utilized. In other embodiments, a self-validating mass flow controller is disclosed that does not require any hardware or mechanical changes to an existing mass flow controller. Still, the disclosed embodiments further include a self-validating mass flow controller that is configured to determine valve leak and sensor offset simultaneously for performing real time in-situ correction of a mass flow controller's output for zero offset or zero drift in the presence of valve leak.
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subjects CONTROLLING
MEASURING
MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL
METERING BY VOLUME
PHYSICS
REGULATING
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
TESTING
title SYSTEM AND METHOD FOR USING A RATE OF DECAY MEASUREMENT FOR REAL TIME MEASUREMENT AND CORRECTION OF ZERO OFFSET AND ZERO DRIFT OF A MASS FLOW CONTROLLER OR MASS FLOW METER
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