INSPECTION APPARATUS AND INSPECTION METHOD

An inspection apparatus for inspecting an inspection object. The inspection object includes a base body and wiring passing through the base body. The inspection apparatus includes an insulating substrate, a first electrode in the substrate with a portion of the first electrode exposed from a surface...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	FUKAMI YOSHIYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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