COMPACT HAZARDOUS GAS LINE DISTRIBUTION ENABLING SYSTEM SINGLE POINT CONNECTIONS FOR MULTIPLE CHAMBERS

A system and method for safely enabling the delivery of at least one gas line to at least one point of use in a facility by using a vacuum system and a gas delivery system wherein the gas delivery system is housed within the vacuum system is disclosed herein. An interior volume of a conduit containi...

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1. Verfasser: DEMARS DENNIS L
Format: Patent
Sprache:eng
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