COMPACT HAZARDOUS GAS LINE DISTRIBUTION ENABLING SYSTEM SINGLE POINT CONNECTIONS FOR MULTIPLE CHAMBERS
A system and method for safely enabling the delivery of at least one gas line to at least one point of use in a facility by using a vacuum system and a gas delivery system wherein the gas delivery system is housed within the vacuum system is disclosed herein. An interior volume of a conduit containi...
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Format: | Patent |
Sprache: | eng |
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