RINSING APPARATUS AND RINSING METHOD FOR POLYCRYSTALLINE SILICON LUMP

A rinsing apparatus for polycrystalline silicon lump which is obtained by cutting or breaking a rod of polycrystalline silicon, including: a wash basket having a plurality of through holes, which carries the polycrystalline silicon lump; a wash tank in which the wash basket is provided therein, in w...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	ATSUMI TETSUYA
Format:	Patent
Sprache:	eng
Schlagworte:	CLEANING CLEANING IN GENERAL PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL TRANSPORTING
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